A Wearable Pressure Sensor Based on Ultra-violet/Ozone Microstructured Carbon Nanotube/ Polydimethylsiloxane Arrays for Electronic Skins.
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Abstract |
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Pressure sensors with high performance (e.g., a broad pressure sensing range, high sensitivities, rapid response/relaxation speeds, temperature-stable sensing), as well as a cost-effective and highly efficient fabrication method are highly desired for electronic skins. In this research, a high-performance pressure sensor based on microstructured carbon nanotube/polydimethylsiloxane arrays was fabricated using an ultra-violet/ozone (UV/O3) microengineering technique. The UV/O3 microengineering technique is controllable, cost-effective, and highly efficient since it is conducted at room temperature in an ambient environment. The pressure sensor offers a broad pressure sensing range (7 Pa - 50 kPa), a sensitivity of ~-0.101±0.005 kPa-1 (<1 kPa), a fast response/relaxation speed of ~10 ms, a small dependence on temperature variation, and a good cycling stability (>5000 cycles), which is attributed to the UV/O3 engineered microstructures that amplify and transfer external applied forces and rapidly store/release the energy during the PDMS deformation. The sensors developed show the capability to detect external forces and monitor human health conditions, promising for the potential applications in electronic skin. |
Year of Publication |
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2018
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Journal |
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Nanotechnology
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Date Published |
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2018
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ISSN Number |
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0957-4484
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URL |
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https://doi.org/10.1088/1361-6528/aaa855
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DOI |
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10.1088/1361-6528/aaa855
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Short Title |
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Nanotechnology
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